氟掺杂对非晶硅薄膜特性的影响

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郑若成,王印权,刘佰清,郑良晨

Influence of Fluorine Doping on the Characteristic of Amorphous Silicon Thin Films

ZHENG Ruocheng, WANG Yinquan, LIU Baiqing, ZHENG Liangchen

电子与封装 . 2020, (3): 30401 . DOI: 10.16257/j.cnki.1681-1070.2020.0310