高浓度硅外延纵向电阻率分布研究

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尤晓杰;王银海;葛华;韩旭

Study on Vertical ResistivityDistribution of Silicon Epitaxy with High Doping Concentration

YOU Xiaojie, WANG Yinhai, GE Hua, HAN Xu

电子与封装 . 2021, (9): 90403 . DOI: 10.16257/j.cnki.1681-1070.2021.0914