中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2016, Vol. 16 ›› Issue (12): 1 -5. doi: 10.16257/j.cnki.1681-1070.2016.0134

• 封装、组装与测试 • 上一篇    下一篇

微组装金丝键合工序统计过程控制技术

范少群,赵丹   

  1. 中国电子科技集团公司第38研究所,合肥 230088
  • 出版日期:2016-12-20 发布日期:2016-12-20
  • 作者简介:范少群(1986—),女,湖北黄冈人,硕士,工程师,2011年毕业于武汉理工大学,主要从事微电路组装工艺研究及相关应用工作。

Research of Statistic Process Control in Gold Wire-bonding

FAN Shaoqun, ZHAO Dan   

  1. China Electronics Technology Group Corporation No.38 Research Institute, Hefei 230088, China
  • Online:2016-12-20 Published:2016-12-20

摘要: 金丝键合质量是影响微波多芯片组件(MMCM)可靠性的一个主要因素,有效识别和控制键合过程的波动,是保证工艺稳定性和合格率的有效手段。SPC技术是定量判断工艺是否处于统计受控状态的核心技术。文中对某型号产品中抽取的金丝拉力数据进行正态分布拟合及正态性检验,采用均值-标准差、均值-极差控制图对金丝拉力数据稳定性进行分析,讨论了不同波动异常情况下的影响因素及解决方法。另外对金丝键合工序能力指数Cpk进行计算、评价,着重分析了提高Cpk值的有效方法。

关键词: 金丝键合, 统计过程控制SPC, 工序能力指数, 分析

Abstract: The quality of gold wire-bonding is an important influential factor of reliability and microwave characteristic of microwave multi-chip module (Microwave MCM). Identifying and controlling the volatility effectively during the bonding process is significant to ensure stability and yields. Statistic Process Control (SPC) is the core technology to quantitatively measure the status of controllment. In the paper, normal distribution fitting and normality test are performed based on a product′s bonding strength data. The x-s control chart and x-R control chart are adopted to analyze the stability of bonding strength data. The influential factors and solutions are discussed in different volatility conditions. The process capability index of gold wire-bonding are calculated and evaluated. Furthermore, an effective method of improving the Cpk value is discussed in details.

Key words: gold wire-bonding, statistical process control(SPC), process capability index, analysis

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