中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2023, Vol. 23 ›› Issue (3): 030103 . doi: 10.16257/j.cnki.1681-1070.2023.0061

所属专题: 先进三维封装与异质集成

• “先进三维封装与异质集成”专题 • 上一篇    下一篇

FCBGA基板关键技术综述及展望*

方志丹;于中尧;武晓萌;王启东   

  1. 中国科学院微电子研究所,北京 100029
  • 收稿日期:2022-11-17 出版日期:2023-03-24 发布日期:2023-03-24
  • 作者简介:方志丹(1977—),女,黑龙江五常人,博士,正高级工程师,主要研究方向为先进封装领域高密度基板及功能基板的集成技术。

Overview and Prospect of Key Technologies of FCBGA Substrate

FANG Zhidan, YU Zhongyao, WU Xiaomeng, WANG Qidong   

  1. Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029, China
  • Received:2022-11-17 Online:2023-03-24 Published:2023-03-24

摘要: 倒装芯片球栅格阵列(FCBGA)基板作为人工智能、5G、大数据、高性能计算、智能汽车和数据中心等新兴需求应用的CPU、图形处理器(GPU)、FPGA等高端数字芯片的重要载体,业界的需求量快速增长。对FCBGA基板的关键技术进行了介绍,包括精细线路技术、翘曲控制技术和局部增强技术。同时,对FCBGA基板技术的发展趋势及应用前景进行了展望。

关键词: 倒装芯片球栅格阵列, 味之素增层膜, 半加成工艺, 翘曲, 嵌入式多芯片互连桥

Abstract: Flip-chip ball grid array (FCBGA) substrate as an important carrier of high-end digital chips such as CPU, GPU, FPGA have been very popular in high-end applications, including artificial intelligence, 5G, big data, high-performance computing, smart cars, and data centers, and the industry demand is growing rapidly.The key technologies of FCBGA substrate are introduced, including fine-line process, warpage control technology and local enhancement technology.At the same time, the development trend and application prospect of FCBGA substrate technology are prospected.

Key words: flip-chip ball grid array, Ajinomoto build-upfilm, semi-additive process, warpage, embedded multi-die interconnect bridge

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