半导体晶圆ENIG/ENEPIG产品设计考量

doi:10.16257/j.cnki.1681-1070.2020.0406

摘要/Abstract

摘要： 通过化学自催化反应在半导体晶圆 I/O 铝或铜金属垫上沉积具有可焊接性的镍金/镍钯金层，此工艺已在 MOSFET、IGBT、RFID、SAW Filter 等产品上得到广泛应用。着重阐述了在新产品设计和工程评估阶段，对于晶圆产品本身应予以考量的因素，如钝化层种类及厚度，I/O 金属垫的成分及结构，切割轨道上金属图形的大小及钝化层的覆盖，不同 I/O pad 的电势等。其中一些因素导致的问题会直接影响化学镍金/镍钯金后产品的性能应用。在化镀工艺过程中，要充分了解产品本身结构以及可能造成的相应缺陷及问题，并且应综合考虑这些因素的影响。

关键词: 半导体晶圆, 化学镍金/镍钯金, 缺陷分析, 产品设计考量

Abstract: The ENIG/ENEPIG(electroless nickel immersion gold/electroless nickel/palladium immersion gold) process is an autocatalytic chemical reaction, which can deposit a weldable Ni/Au or Ni/Pd/Au layer on semiconductor wafer I/O metal pad渊aluminum or copper冤, and it is widely used in the field of MOSFET, IGBT, RFID, SAW Filter etc. The factors directly related to the function and structure of semiconductor wafer are considered and analyzed, including passivation coverage and its thickness, the composition and structure of I/O metal pad, the features on the dicing street , the potential effect of different I/O pad. These factors will directly impact the quality and function of semiconductor wafers after ENIG/ENEPIG process, and should be considered during product design and engineering evaluation.

Key words: semiconductor wafer, ENIG/ENEPIG, defect analysis, product design considerations

中图分类号:

TQ153.1

刘勇. 半导体晶圆ENIG/ENEPIG产品设计考量[J]. 电子与封装, 2020, 20(4): 040401 .

LIU Yong. Design Considerations for ENIG/ENEPIG Technological Process on Semiconductor Wafer[J]. Electronics & Packaging, 2020, 20(4): 040401 .

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中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊