关键词: 飞秒激光加工, 流体辅助, 硬脆材料, 半导体材料, 微纳加工, 加工机理

Abstract: Femtosecond laser short pulse, high energy density characteristics, to a certain extent, can realize the “cold processing” effect, get the field of micro-nano-processing is widely concerned, however, the “cold processing” effect in the processing of different materials is not the same; fluid can enhance the processing of heat transfer However, the effect of “cold processing” is not the same in different materials processing; fluid can enhance the heat transfer in processing to reduce the thermal effect, and produce cavitation bubble effect with femtosecond laser to promote the removal of materials and improve the processing efficiency and quality, therefore, fluid-assisted femtosecond laser has become an emerging micro-nano processing method. In this paper, a review of fluid-assisted femtosecond laser micro-nano-processing of common materials in semiconductors is presented, covering the experimental applications, theoretical calculations and mechanism mechanism of different auxiliary fluids. The paper concludes that fluid-assisted femtosecond laser processing has unique advantages in the field of micro-nano-processing, but there are still some unsolved problems, such as the specific mechanism of action in different fluid environments, the precise relationship between processing parameters and material properties, and the establishment of thermodynamic modeling in the processing process.

Key words: Femtosecond laser processing, Fluid-assisted, Hard and brittle materials, Semiconductor materials, Micro- and nanofabrication, Processing mechanisms