中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装

• 材料、器件与工艺 •    下一篇

集成超势垒整流器SiC MOSFET的动态可靠性

孙晶,邓正勋,李航,孙亚宾,石艳玲,李小进   

  1. 华东师范大学通信与电子工程学院,上海  200241
  • 收稿日期:2025-04-08 修回日期:2025-05-04 出版日期:2025-10-31 发布日期:2025-10-31
  • 通讯作者: 李小进
  • 基金资助:
    国家自然科学基金(62274064,62274063);上海科学与技术探索者计划(22TS1401100,22TS1401400,22TS1401700)

Dynamic Reliability of SiC MOSFET with Integrated Super Barrier Rectifiers

SUN Jing, DENG Zhengxun, LI Hang, SUN Yabin, SHI Yanling, LI Xiaojin   

  1. School of Communication & Electronic Engineering, East China Normal University, Shanghai 200241, China
  • Received:2025-04-08 Revised:2025-05-04 Online:2025-10-31 Published:2025-10-31

摘要: 采用计算机辅助软件(TCAD),对集成超势垒整流器(SBR)的对称型SiC MOS器件(DT-SBR-MOS)和非对称型SiC MOS器件(AT-SBR-MOS)的热特性、非钳位感性负载开关(UIS)过程和短路(SC)能力进行分析,揭示两新型SiC MOS器件的动态可靠性机理,弥补了SiC MOS器件可靠性研究的缺失。研究结果表明,在相同输入功率条件下,由于SBR结构的不同,AT-SBR-MOS的反向导通热阻较DT-SBR-MOS降低了17%。在单次脉冲测试中,因AT-SBR-MOS半包围式的P-well区增强了对N型漂移区的耗尽,使得其雪崩耐受能量比DT-SBR-MOS高出11%。此外,由于AT-SBR-MOS比DT-SBR-MOS具有更小的电流流通路径,短路耐受时间提高了2 µs。综合数据表明,AT-SBR-MOS的反向导通热特性、雪崩耐受能力和短路耐受性能均优于DT-SBR-MOS,为高性能SiC功率器件设计提供了重要的参考依据。

关键词: 超势垒整流器, 热特性, 非钳位感性负载开关, 短路能力

Abstract: A computer-aided software (TCAD) is used to analyze the thermal characteristics of symmetric SiC MOS devices (DT- SBR-MOS) and asymmetric SiC MOS devices (AT-SBR-MOS) with integrated super barrier rectifiers (SBR), the unclamped inductive load switching (UIS) process and the short circuit (SC) capability to reveal the dynamic reliability mechanism of the two new SiC MOS devices. UIS process and SC capability are analyzed to reveal the dynamic reliability mechanism of the two new types of SiC MOS devices, and to make up for the lack of reliability studies on SiC MOS devices. The results show that the reverse conduction thermal resistance of AT-SBR-MOS is 17% lower than that of DT-SBR-MOS under the same input power condition due to the different SBR structure. In the single-pulse test, the avalanche tolerance energy of AT-SBR-MOS is 11% higher than that of DT-SBR-MOS due to the semi-enclosed P-well region of AT-SBR-MOS which enhances the depletion of the N-type drift region. In addition, the short-circuit withstand time of AT-SBR-MOS is improved by 2 µs due to its smaller current flow path than that of DT-SBR-MOS. The comprehensive data show that the reverse conduction thermal characteristics, avalanche tolerance, and short-circuit withstand performance of AT-SBR-MOS are better than that of DT-SBR-MOS, which provides an important reference for the design of high-performance SiC power devices

Key words: super barrier rectifier, thermal property, unclamped inductive switching, short circuit