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李静文，尹春燕，窦广彬
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LI Jingwen, YIN Chunyan, DOU Guangbin
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摘要： 为满足惯性导航等领域对高性能加速度计的迫切需求，文章系统总结分析了石英谐振加速度计的研究现状及关键技术研究进展。首先，阐述了其工作原理与发展历程，以石英谐振加速度计的性能提升策略为线索，重点围绕敏感结构设计、湿法刻蚀工艺优化、热应力控制与星载环境可靠性提升等关键技术，对国内外的代表性研究成果进行了归纳。最后，对石英谐振加速度计的未来发展方向进行了展望，指出多物理场协同设计、先进制造工艺的工程化以及更高集成度的片上系统是其可能的未来发展趋势。
关键词: 石英, 谐振加速度计, 微电子机械系统
Abstract:
To address the urgent demand for high-performance accelerometers in fields such as inertial navigation, this article systematically reviews the research status and key technological advancements in quartz resonant accelerometers. Building upon an explanation of its working principle and development history, and following the thread of performance enhancement strategies, the review focuses on key technologies including sensitive structure design, wet etching process optimization, thermal stress control, and reliability enhancement for spaceborne applications by summarizing and analyzing representative domestic and international research achievements. Finally, the review provides an outlook on future development directions, identifying multi-physics co-design, the engineering of advanced manufacturing processes, and higher levels of System-on-Chip integration as probable future trends.
Key words: quartz, resonant accelerometer, micro-electromechanical system
李静文, 尹春燕, 窦广彬. 石英谐振加速度计研究进展[J]. 电子与封装, doi: 10.16257/j.cnki.1681-1070.2026.0042.
LI Jingwen, YIN Chunyan, DOU Guangbin. Recent Advances in Quartz Resonant Accelerometers[J]. Electronics & Packaging, doi: 10.16257/j.cnki.1681-1070.2026.0042.
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链接本文: https://ep.org.cn/CN/10.16257/j.cnki.1681-1070.2026.0042
