关键词: 键合强度, 替代样本, 特征参数仿真, 方差分析法, 测量系统分析

Abstract: The measurement of wire bonding strength is destructive and non-repeatable, which cannot be analyzed using traditional measurement system analysis methods. The method of simulating the mean value and standard deviation of characteristic parameters of the overall distribution of process parameters is adopted, and the standard weights subjected to the same normal distribution are selected as the alternative samples.The repeatability and reproducibility of the wire bonding strength measurement system are calculated using the analysis of variance method, and the interaction between the alternative samples and the operator is analyzed.The measurement system analysis method based on characteristic parameter simulation can reflect the precision of wire bonding strength measurement system, reducing the statistical process control cost of production?line.

Key words: bondstrength, alternative samples, characteristic parameter simulation, analysis ofvariancemethod, measurement systemanalysis