关键词: 温度传感器, CMOS工艺, 误差校准

Abstract: Aiming at the measurement errors caused by the non-ideal factors of CMOS devices in integrated sensors, a digital calibration circuit is designed. The calibration circuit is composed of a memory module, an offset error calibration module, a gain error calibration moduleand so on.Because the analog devices are greatly influenced by temperature and the gain linearity varies at different temperatures, the gain error is calibrated by sub-temperature intervals.The circuit is implemented in 0.18 μm CMOS technology, and the error of the temperature sensor can be improved to -0.05~+0.15 ℃ after calibration.

Key words: temperature sensor, CMOS technology, error calibration