中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2025, Vol. 25 ›› Issue (1): 010401 . doi: 10.16257/j.cnki.1681-1070.2025.0003

• 材料、器件与工艺 • 上一篇    下一篇

镍电极MLCC排胶后残碳量及其电性能研究

蒋晋东1,易凤举2,陈沫言2,程淇俊2   

  1. 1. 中国航天宇航元器件工程中心,北京? 100094;2. 成都宏科电子科技有限公司,成都? 610100
  • 收稿日期:2024-05-30 出版日期:2025-01-22 发布日期:2025-01-22
  • 作者简介:蒋晋东(1986—),女,山东菏泽人,硕士,高级工程师,研究方向为宇航用元器件的制造与应用;易凤举(1981—),男,四川泸州人,学士,工程师,研究方向为多层陶瓷电容器的制造与研究。

Research on Residual Carbon Content and Electrical Properties of Nickel Electrode MLCC After Glue Removal

JIANG Jindong1, YI Fengju2, CHEN Moyan2, CHENG Qijun2   

  1. 1. China Aerospace Components EngineeringCenter, Beijing 100094, China; 2.Chengdu Hongke Electronic Technology Co.,Ltd., Chengdu 610100, China
  • Received:2024-05-30 Online:2025-01-22 Published:2025-01-22

摘要: 多层陶瓷电容(MLCC)固有的坯体有机物残留导致产品可靠性低,其主要原因是排胶不充分。通过改变排胶工序的不同工艺条件,使用硫碳分析仪对排胶后坯体残碳量进行量化,结合破坏性物理分析、扫描电镜对烧成后的产品进行结构分析,并对成品进行电性能测试,探索残碳量与成品的电极连续性、电性能及可靠性之间的联系。结果表明通过增大气体交换、降低排胶升温速率、延长保温时间等手段可有效降低排胶后的残碳量,烧成MLCC的内电极连续性变得更好,容量和击穿电压等电性能数据得到提升,介质层变得更致密,使用寿命延长。所探讨的测定排胶充分性以及增加排胶充分性的方法可为MLCC工业生产中的排胶作业提供参考。

关键词: MLCC, 残碳量, 排胶, 电极连续性, 电性能

Abstract: The inherent organic residue in the green body of multi-layer ceramic capacitors (MLCC) leads to low product reliability, which is mainly due to insufficient glue removal. By changing the different process conditions of the glue removal step, the residual carbon content of the green body after glue removal is quantified using a sulfur carbon analyzer. Combined with destructive physical analysis and scanning electron microscopy, the structure of the fired product is analyzed, and the electrical performance of the finished product is tested to explore the relationship between residual carbon content and the electrode continuity, electrical performance, and reliability of the finished product. The results show that the residual carbon content after glue removal can be effectively reduced by increasing gas exchange, reducing the heating rate of glue removal, and extending holding time. The continuity of the internal electrode of the fired MLCC becomes better, and the electrical performance data such as capacity and breakdown voltage are improved. The dielectric layer becomes denser and the service life becomes longer. The discussed methods for determining the adequacy of glue removal and increasing the adequacy of glue removal can provide a reference for glue removal operations in MLCC industrial production.

Key words: MLCC, residual carbon content, glue removal, electrode continuity, electrical performance

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