关键词: LTCC基板；双面空腔；叠片；层压；共烧；腔底平整度

Abstract: By gradual improvement of the process tools as the sheet stacker, cavity plug, polymer liner, co-firing cushion, etc. and the corresponding process methods, the difficult processes of double-side cavity’s LTCC as stacking, block lamination and brick co-firing were emphatically studied and broken through. The double-side cavity’s LTCC substrate manufacturing process technology was effectively mastered. The key technical parameters were reached: cavity bottom flatness is not larger than 0.08mm and cavity dimension precision is better than ± 0.15 mm, and moreover, the double-side cavity’s LTCC substrate which fulfilled the application requirements was successfully developed.

Key words: LTCC substrate; double-side cavity; stacking; lamination; co-firing; cavity bottom flatness