中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2025, Vol. 25 ›› Issue (9): 090204 . doi: 10.16257/j.cnki.1681-1070.2025.0094

• 封装、组装与测试 • 上一篇    下一篇

高导热高温共烧陶瓷封装外壳研究进展

尚承伟   

  1. 合肥芯谷微电子股份有限公司,合肥  230031
  • 收稿日期:2025-01-23 出版日期:2025-09-28 发布日期:2025-02-26
  • 作者简介:尚承伟(1983—),男,安徽合肥人,硕士,高级工程师,主要从事微波器件及组件相关制造工艺技术及材料的研究。

Research Progress on High Thermal Conductivity High Temperature Co-Fired Ceramic Packaging Shells

SHANG Chengwei   

  1. Hefei IC ValleyMicroelectronics Co., Ltd., Hefei 230031, China
  • Received:2025-01-23 Online:2025-09-28 Published:2025-02-26

摘要: 高温共烧陶瓷(HTCC)外壳因其优异的性能,在电子封装领域发挥着重要作用。随着大功率器件的大量应用,对陶瓷封装外壳的散热提出了越来越高的要求。阐述了高温共烧陶瓷外壳的特性、主要结构、导热机理及影响封装外壳导热的因素,从封装外壳的导热设计、陶瓷导热材料和金属导热材料等方面系统总结了近年来高导热陶瓷封装外壳的研究现状,并对未来高导热封装外壳材料的研究进行了展望。

关键词: 高温共烧陶瓷, 高导热, 散热设计, 复合金属材料, 氮化铝陶瓷

Abstract: High temperature co-fired ceramic (HTCC) packages play a pivotal role in electronic packaging due to their superior performance. With the widespread application of high power devices, increasingly stringent demands have been placed on the thermal management capabilities of ceramic packaging shells. The characteristics, principal architectures, thermal conduction mechanisms, and the factors affecting thermal conductivity in HTCC packages are identified. Recent advances in high thermal conductivity ceramic packaging shells are systematically summarized from thermal design of the packaging shell, ceramic thermal interface materials, and metallic thermal interface materials. The future research for high thermal conductivity packaging materials is outlined.

Key words: high temperature co-fired ceramic, high thermal conductivity, heat dissipation design, composite metal material, AlN ceramic

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