石英谐振式加速度计研究进展*

doi:10.16257/j.cnki.1681-1070.2026.0042

摘要/Abstract

摘要： 加速度计是确保惯性导航系统精确测量的核心传感器。系统分析石英谐振式加速度计的研究现状及关键技术进展。围绕敏感结构设计、湿法刻蚀工艺优化、热应力控制与星载环境可靠性提升四大关键技术，对国内外的代表性研究成果进行总结。最后对石英谐振式加速度计的未来发展进行展望，指出多物理场协同设计、先进制造工艺及更高集成度的片上系统是该领域未来的核心发展趋势。

关键词: 微电子机械系统（MEMS）, 谐振式加速度计, 石英

Abstract: Accelerometers are the core sensors for ensuring precise measurements in inertial navigation systems. The current research status and key technological advancements of quartz resonant accelerometers are systematically analyzed. Representative domestic and international research achievements are summarized, with a focus placed on four key technologies: sensitive structure design, wet etching process optimization, thermal stress control, and reliability enhancement in spaceborne environments. Finally, the future development of quartz resonant accelerometers is envisioned. Multi-physics co-design, advanced manufacturing processes, and highly integrated system-on-chip are identified as the core future developmental trends in this field.

Key words: micro-electromechanical system (MEMS), resonant accelerometer, quartz

中图分类号:

李静文, 尹春燕, 窦广彬. 石英谐振式加速度计研究进展^*[J]. 电子与封装, 2026, 26(4): 040501 .

LI Jingwen, YIN Chunyan, DOU Guangbin. Recent Advances in Quartz Resonant Accelerometers[J]. Electronics & Packaging, 2026, 26(4): 040501 .

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中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

石英谐振式加速度计研究进展^*

Recent Advances in Quartz Resonant Accelerometers

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