关键词: 本征模, 电源分配网络, 谐振点, 去耦电容, 目标阻抗

Abstract: Aiming at the power integrity of the increasingly complicated multi-layer substrate, this paper proposes a simulation way for analyzing the impedance of the PDN greater than the target impedance in the required frequency range. Based on the thirteen-layer AlN substrate, Zimpedance can be got by AnsysSiwave software, and it can be seen whether there is a resonant point or not. For the resonance, the distribution of the resonance can be seen for verifying the location of the maxim resonance by Eigen Mode. By the loadof the decoupling capacitors at the location of maxim resonance, the frequency of the resonant point can be moved to higher frequency for achieving the goal of Zimpedance meeting the requirement of the target impedance.

Key words: eigen mode, power delivery network, resonant point, decoupling capacitor, target impedance