中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2021, Vol. 21 ›› Issue (4): 040404 . doi: 10.16257/j.cnki.1681-1070.2021.0412

• 微电子制造与可靠性 • 上一篇    下一篇

一种高压模拟开关漏电失效解决方法

黄立朝1;阎燕山2;程绪林1;张如州1   

  1. 1.中科芯集成电路有限公司,江苏 无锡 214072;2.中国航空无线电电子研究所,上海 201100
  • 收稿日期:2020-10-23 出版日期:2021-04-27 发布日期:2020-11-30
  • 作者简介:黄立朝(1977—),男,陕西渭南人,2000年毕业于南京理工大学电子工程与光电技术学院,硕士学历,现从事模拟集成电路设计研发工作,主要研究方向为精密运算放大器、温度传感器等。

Leakage FailureAnalysis Based on High Voltage Analog Switch

HUANG Lichao1, YAN Yanshan2, CHENG Xulin1, ZHANG Ruzhou1   

  1. 1.China Key System & Integrated Circuit Co., Ltd., Wuxi 214072, China; 2.Aeronautical Radio Electronics Research Institute, Shanghai 201100, China
  • Received:2020-10-23 Online:2021-04-27 Published:2020-11-30

摘要: 高压模拟开关在现代超声领域发挥关键作用。综合考量传输速度、导通电阻、通道隔离度等性能指标,利用红外热成像技术解决了电路漏电的失效问题。该技术包括红外热成像、漏电失效分析、漏电测试、器件原理分析及漏电解决方案等措施,提出了高压模拟开关器件漏电失效问题的通用解决方法,对高压模拟开关漏电失效问题的解决具有较高的参考价值。另外,该方法通过对器件内部工艺结构的分析,发现了器件漏电失效的本质因素,对后续器件工艺结构的改进具有一定的指导意义。

关键词: 高压开关, 漏电失效, 系统结构

Abstract: High voltage analog switch plays a key role in modern ultrasonic field. Performance indicators such as transmission speed, conductive resistance and channel isolation are sonsidered comprehensively. The problem of circuit leakage failure is solved by infrared thermal imaging technology. The method includes infrared thermal imaging, leadkage failure analysis, leakage testing, device principle analysis and leakage solutions. A general solution for leakage failure of high voltage analog switching devices is presented. It is of great significance to solve the leakage failure problem of high voltage analog switch. In addition, the method analyzes the internal process structure of the device, the essential factor of leakage failure is found. It has some guiding significance for the subsequent improvement of device process structure.

Key words: highvoltageswitch, leakagefailure, systemstructure

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