关键词: 硅基微流道, 高效散热, 宽带微波

Abstract: Silicon-based microchannel heat dissipation technology can achieve efficient cooling capacity of hundreds of watts per square centimeter. Silicon-based microchannel radiator which can realize the cooling capacity of more than 600 W/cm² is fabricated. As semiconductor material, the parasitic effect of silicon will affect the grounding performance of microwave power chips. After integral metallization, the silicon microchannel radiator can meet the application requirements of broadband microwave transceiver module. Furthermore, silicon-based microchannel radiator is integrated into a high-power transceiver module. In the frequency range of 2~6 GHz, the module can work normally, and the saturated output power is more than 40 dBm.

Key words: silicon-basedmicrochannel, highefficiencyheatdissipation, broadbandmicrowave