用于Si-APD的高能注入工艺优化研究
刘祥晟，荆思诚，王晓媛，张明，陈慧蓉，潘建华，朱少立
Optimization Study of High-Energy Implantation Process for Si-APD
LIU Xiangsheng, JING Sicheng, WANG Xiaoyuan, ZHANG Ming, CHEN Huirong, PAN Jianhua, ZHU Shaoli
电子与封装
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2024, (11): 110403
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DOI: 10.16257/j.cnki.1681-1070.2024.0161
