某MEMS垂直探针在针测行程作用下的屈曲力学行为研究

导航

秦林肖

Research on Buckling Properties of one MEMS Vertical Probe under Overdrive Displacement

QIN Linxiao

电子与封装 . 0, (): 0 -0 . DOI: 10.16257/j.cnki.1681-1070.2025.0052