硅基射频微系统的传热及热-力耦合仿真研究
孙浩洋, 高一睿, 姬峰, 兰梦伟, 王成伟, 韩宇, 张鹏哲, 郭振华
Heat Transfer and Thermal-Force Coupling Simulation of Silicon-Based Radio-Frequency Microsystems
SUN Haoyang, GAO Yirui, JI Feng, LAN Mengwei, WANG Chengwei, HAN Yu, ZHANG Pengzhe, GUO Zhenhua
电子与封装
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DOI: 10.16257/j.cnki.1681-1070.2026.0048
