双腔结构器件的下层腔体的PIND方法研究
李菁萱, 井立鹏, 苏帅, 李洪剑, 荆林晓, 冯小成
Research on the PIND Method for the Lower Cavity of Dual-Cavity Devices
LI Jingxuan, JING Lipeng, SU Shuai, LI Hongjian, JING Linxiao, FENG Xiaocheng
电子与封装
.
0, (): 0
-0
.
DOI: 10.16257/j.cnki.1681-1070.2026.0116
