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双腔结构器件的下层腔体的PIND方法研究

李菁萱,井立鹏,苏帅,李洪剑,荆林晓,冯小成   

  1. 北京微电子技术研究所,北京  100076
  • 收稿日期:2026-01-31 修回日期:2026-03-10 出版日期:2026-03-19 发布日期:2026-03-19
  • 通讯作者: 李洪剑

Research on the PIND Method for the Lower Cavity of Dual-Cavity Devices

LI Jingxuan, JING Lipeng, SU Shuai, LI Hongjian, JING Linxiao, FENG Xiaocheng   

  1. Beijing Microelectronics Technology Institute, Beijing 100076, China
  • Received:2026-01-31 Revised:2026-03-10 Online:2026-03-19 Published:2026-03-19

摘要: 由于双腔结构器件的下层腔体位于整体结构内凹处,常规颗粒碰撞噪声检测(PIND)检测手段无法直接检测出准确的结果,多余物检测不到位易导致产品短路甚至烧毁。本文为研究双腔结构器件下腔的最佳PIND检测方法,设计了自带凸台结构的测试工作台并进行典型多余物的PIND检测试验,同时与纯铝垫块法、硅凝胶法、陶瓷面测试法及直接测试金属框法进行对比;结果表明,在检测上下腔结构陶瓷器件下腔时,虽然存在少量信号损失,但特制工作台法仍是五种方法中最灵敏的检测方式。

关键词: 双腔结构, 下层腔体, PIND, 信号传递效率

Abstract: Due to the recessed position of the lower cavity within the overall structure of dual-cavity devices, conventional PIND detection methods cannot directly yield accurate results. Inadequate detection of foreign objects may lead to product short circuits or even burnout. This paper investigates the optimal PIND detection method for the lower cavity of dual-cavity devices. A test fixture with an integrated protrusion structure was designed and employed for PIND testing on typical foreign objects. Comparisons were conducted against methods using pure aluminum spacers, silicone gel, ceramic surface testing, and direct metal frame testing. Results indicate that while minor signal loss occurs during detection of the lower cavity in ceramic devices with dual-cavity structures, the custom fixture method remains the most sensitive detection approach among the five evaluated techniques.

Key words: dual-chamber structures, lower cavity,  PIND, signal transmission efficiency