P型外延电阻率表面态的研究

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仲张峰,韩旭,潘文宾,葛华,尤晓杰,王银海,杨帆

Study on the Surface State of P-type Epitaxial Resistivity

ZHONG Zhangfeng, HAN Xu, PAN Wenbin, GE Hua, YOU Xiaojie, WANG Yinhai, YANG Fan

电子与封装 . 2020, (3): 30402 . DOI: 10.16257/j.cnki.1681-1070.2020.0311