关键词: 垂直PIN, 异质集成, 高功率限幅器

Abstract: A novel integrated vertical PIN limiter was submitted firstly. Structure parameters such as thickness and concentration of layers P⁺, I and N⁺ were determined according to power requirement, and implementation processes and technologies were designed. The successfully developed limiter with SiC substrate and a size of 3.3 mm×3.1 mm not only could continuously endure continuous wave (CW) power of 200 W, different pulse power of 300 W, 400 W, 500 W, 600 W, 700 W at frequency of 3.5 GHz for 10 minutes, but also only 10.3-13.7 dBm leakage power appeared at its output. Because of the lack of higher power source and the limited power ability of the connectors and cables, much higher power experiments will be proceed in the future. The measurement results verified the feasibility of heterogeneous integration, and the advancement of vertical PIN structure, which largely increased the limiter’s power endurance.

Key words: verticalPIN, heterogeneousintegration, highpowerlimiter