中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装

• 材料、器件与工艺 •    下一篇

GaN功率放大器输出功率下降失效分析

张茗川,戈硕,袁雪泉,钱婷,章勇佳,季子路   

  1. 中国电子科技集团公司第五十五研究所,南京  210016
  • 收稿日期:2024-09-12 修回日期:2024-10-15 出版日期:2025-01-07 发布日期:2025-01-07
  • 通讯作者: 张茗川
  • 基金资助:
    江苏省重点研发计划(BE2022070-2)

Failure Analysis of GaN Power Amplifier Output Power Decrease

ZHANG Mingchuan, GE Shuo, YUAN Xuequan, QIAN Ting, ZHANG Yongjia, JI Zilu   

  1. The 55th Research Institute of China Electronics Technology Group Corporation, Nanjing, 210016, China
  • Received:2024-09-12 Revised:2024-10-15 Online:2025-01-07 Published:2025-01-07

摘要: GaN管芯是微波功率放大器中的核心器件,其热性能很大程度决定了功率放大器的电性能。针对某一型号功率放大器在直流老化后出现输出功率下降现象,利用红外热像、声学扫描、能谱分析等分析方法对失效功率放大器开展了分析研究。结果表明,放大器管芯背金金属层之间发生明显分层,导致器件热阻增大,老炼时管芯结温超过安全工作区,从而使得放大器输出功率下降。

关键词: 功率下降, 背金, 热阻

Abstract: GaN die is the core component in microwave power amplifiers, and its thermal performance largely determines the electrical performance of power amplifiers. Aiming at the phenomenon of output power decrease of a type of power amplifier after DC burn-in, infrared thermal imaging, acoustic scanning, energy spectrum analyze and other methods are used to analysis and study the failed power amplifier. The results show that there is a significant peeling between the metal layers on the back side metal of the die, leading to an increase in the thermal resistance. During aging, the junction temperature of the chip exceeds the safe operating zone, resulting in a decrease in amplifier output power.

Key words: output power decrease, back side metal, thermal resistance