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中国电子学会电子制造与封装技术分会会刊

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基于SnO2/Co3O4的微波丙酮气体传感器

周腾龙1吴滨1,2,秦晟栋2,吴蓓2,梁峻阁1   

  1. 1. 江南大学集成电路学院,江苏 无锡  214122;2. 无锡市恒通电器有限公司,江苏 无锡  214121
  • 收稿日期:2024-12-24 修回日期:2025-03-03 出版日期:2025-03-06 发布日期:2025-03-06
  • 通讯作者: 梁峻阁
  • 基金资助:
    国家重点研发计划(2021YFA1401103);2022无锡太湖人才计划:创新领军人才团队(1096010241230120)

Microwave Acetone Gas Sensor Based on SnO2/Co3O4

ZHOU Tenglong1, WU Bin1,2, QIN Shengdong2, WU Bei2, LIANG Junge1   

  1. 1. School of Integrated Circuits, Jiangnan University, Wuxi 214122, China; 2.Wuxi Hengtong Electric Appliance Co., Ltd., Wuxi 214121, China
  • Received:2024-12-24 Revised:2025-03-03 Online:2025-03-06 Published:2025-03-06

摘要: 为解决传统气体传感器需高温加热实现气体检测的问题,研究设计了一种基于螺旋结构的微波传感器,在2.8 GHz频段产生独立传输零点。通过静电纺丝和高温煅烧工艺制备了SnO2-Co3O4复合纤维,并利用谐振器结构制作了新型微波气体传感器。该传感器采用n-p材料复合异质结构,实现了对2.0~12.0 ×10-5体积浓度范围内丙酮的高精度测量,具有操作简便、低成本和小型化等优势。实验结果显示,在室温下,SnO2-Co3O4复合纤维对1.20×10-4体积浓度丙酮的响应表现为回波损耗变化,灵敏度为3.28×107 mdB,谐振幅值变化量为3.28 dB。该研究为工业和实验室中低浓度、高精度气体检测提供了新方案。

关键词: 气体传感器, 复合异质结, 微波检测, 丙酮

Abstract: To address the issue of traditional gas sensors requiring high-temperature heating for gas detection, a microwave sensor based on a spiral structure was designed, generating an independent transmission zero at the 2.8 GHz frequency band. SnO2-Co3O4 composite fibers were prepared using electrospinning and high-temperature calcination processes, and a novel microwave gas sensor was fabricated using a resonator structure. This sensor employs an n-p material composite heterostructure, enabling high-precision measurement of acetone in the range of 2.0-12.0 ×10-5, with advantages such as simple operation, low cost, and miniaturization. Experimental results showed that at room temperature, the response of SnO2-Co3O4 composite fibers to 1.20 ×10-4 acetone was reflected in the change of return loss, with a sensitivity of 3.28×107 mdB and a harmonic amplitude variation of 3.28 dB. This research provides a new solution for low-concentration, high-precision gas detection in industrial and laboratory settings.

Key words: gas sensor, composite heterojunction, microwave detection, acetone