中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装

• 封装、组装与测试 •    下一篇

温度循环载荷下功率器件失效机理研究

谢林毅1,粟浪1,程佳2,黄青树1,冉亮2   

  1. 1. 润西微电子(重庆)有限公司,重庆  400060;2. 华润微电子(重庆)有限公司,重庆  400060
  • 收稿日期:2025-08-03 修回日期:2025-11-03 出版日期:2025-12-05 发布日期:2025-12-05
  • 通讯作者: 谢林毅

Research on Failure Mechanisms of Power Devices under Temperature Cycling Loads

XIE Linyi1, SU Lang1, CHENG Jia2, HUANG Qingshu1, RAN Liang2   

  1. 1. Runxi Microelectronics (Chongqing) Co., Ltd., Chongqing 400060, China; 2. China Resources Microelectronics (Chongqing) Co., Ltd., Chongqing 400060, China
  • Received:2025-08-03 Revised:2025-11-03 Online:2025-12-05 Published:2025-12-05

摘要: 功率器件作为电力电子系统的核心元件,其可靠性至关重要。当前针对功率器件在温度循环(TC)载荷下的失效机理研究尚显不足。为此,采用试验表征与失效机理分析相结合的方法,研究功率器件在温度循环载荷下的失效模式与失效机制,为后续功率器件的可靠性设计与寿命预测提供理论依据与技术参考。首先,阐述了TC实验的基本原理、实验目标及实施方法;随后,对器件实施TC实验,获取实验后的电性参数,并对所得数据进行系统性的分析。同时,对电性失效的器件通过失效分析技术发现钝化层的破裂会使得湿气入侵芯片内部,最终导致器件的热击穿失效。最后,从材料与工艺层面给出了相应的钝化层改善方向,为产品的研究提供技术参考。

关键词: 温度循环试验, 功率器件, 可靠性, 失效机理

Abstract: As the core components of power electronic systems, the reliability of power devices is very crucial. Current research on the failure mechanisms of power devices under temperature cycling (TC) loads is still insufficient. Therefore, this study adopts a method combining experimental characterization with failure mechanism analysis to investigate the failure modes and mechanisms of power devices under temperature cycling loads. This research aims to provide theoretical foundations and technical references for the reliability design and lifetime prediction of power devices in future applications. This paper first introduces the principles, objectives, and methods of the TC test. Then, the devices are subjected to TC testing, electrical parameter data are collected after the tests, Meanwhile, failure analysis on electrical failures revealed that cracks in the passivation layer allow moisture to penetrate the chip's interior, ultimately leading to thermal breakdown of the device. Finally, corresponding improvement strategies for the passivation layer are proposed from both material and process perspectives, providing technical guidance for product development.

Key words:

temperature cycling test, power devices, reliability, failure mechanisms