关键词: 微电子工艺, 清洗工艺, 正溴丙烷, 热稳定性, 材料兼容性

Abstract: N-propy bromide (nPB)-based cleaning agents have great popularity in microelectronic cleaning field. Commonly, additives are applied to suppress the decomposition of nPB and enhance the cleansing power. Experimental works have been carried out to explore the compositional effects of additives on the performance of nPB cleaning agents, in respect of wettability, thermal stability, reserving stability, material compatibility, and cleansing power. The results reveal that nitroalkane can improve the material compatibility, but lead to poor thermal stability; phenol maintains much better thermal stability than nitroalkane; alcohol can increase cleansing power, but decrease reserving stability.

Key words: microelectronic process, cleaning process, n-propy bromide, thermal stability, material compatibility