电子与封装
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马立凡,胡妍妍,王珺
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MA Lifan, HU Yanyan, WANG Jun
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摘要: 塑封半导体器件在高温高湿环境下的可靠性是其长期稳定运行的关键挑战之一。由于环氧塑封料的聚合物基体有吸湿性,吸湿降低了器件内部界面的强度、可能引发腐蚀,且湿热高应力增加了界面分层失效、器件翘曲等风险。文章综述了国内外关于塑封半导体器件耐湿热可靠性的研究进展,包括湿热失效机理、湿扩散理论、湿热可靠性实验、仿真方法及常用表征技术等。并从材料的选择与改性、结构设计及封装工艺三方面总结塑封半导体器件湿热可靠性优化策略和改善途径,为塑封半导体器件在湿热环境下的可靠性设计和评估提供参考与方法指导。
关键词: 塑封半导体器件, 湿热可靠性, 失效机理, 湿扩散, 湿热应力
Abstract: The reliability of plastic-encapsulated semiconductor devices under high-temperature and high-humidity conditions poses one of the critical challenges for the long-term stable operation. Owing to the moisture-absorbing characteristics of the crosslinked polymer network of epoxy molding compounds, moisture uptake can reduce interfacial strength and facilitate corrosion, thereby increasing the risk of delamination, warpage and other failures under hygrothermal loading. This paper reviews recent advances in the study of hygrothermal reliability of plastic-encapsulated devices, including hygrothermal failure mechanisms, moisture diffusion theory, hygrothermal reliability experiments, simulation methodologies, and commonly used characterization techniques. Optimization strategies for improving the hygrothermal reliability of plastic-encapsulated devices are discussed in terms of material modification, structural design, and packaging processes, providing methodological guidance for reliability design and evaluation in hygrothermal environments.
Key words: plastic-encapsulated semiconductor devices, Hygrothermal reliability, Failure mechanisms, moisture diffusion, hygrothermal stress
马立凡, 胡妍妍, 王珺. 塑封半导体器件耐湿热可靠性研究方法及进展[J]. 电子与封装, doi: 10.16257/j.cnki.1681-1070.2026.0080.
MA Lifan, HU Yanyan, WANG Jun. Hygrothermal Reliability of Plastic-encapsulated Semiconductor Device: Methods and Progress[J]. Electronics & Packaging, doi: 10.16257/j.cnki.1681-1070.2026.0080.
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链接本文: https://ep.org.cn/CN/10.16257/j.cnki.1681-1070.2026.0080