中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装

• 综述 •    下一篇

基于封装结构版图的高保真湿扩散仿真方法

刘泓利,代岩伟,秦飞   

  1. 北京工业大学电子封装技术与可靠性研究所,北京  100124
  • 收稿日期:2025-11-25 修回日期:2026-01-26 出版日期:2026-01-28 发布日期:2026-01-28
  • 通讯作者: 代岩伟
  • 基金资助:
    北京市自然科学基金-小米创新联合基金项目(L233001、L243030)

Simulation Method of High-fidelity Moisture Diffusion Based on the Layout of Packaging Structure

LIU Hongli, DAI Yanwei, QIN Fei   

  1. Institute of Electronics Packaging Technology and Reliability, Beijing University of Technology, Beijing 100124, China
  • Received:2025-11-25 Revised:2026-01-26 Online:2026-01-28 Published:2026-01-28
  • Contact: 岩伟 代

摘要: 面向集成电路领域的高环境适应性与高集成度需求,对封装器件的湿可靠性问题与多尺度问题的研究尤为重要。电子封装结构的高密度金属布线与平面设计是影响湿扩散的主要因素。以集成电路典型封装结构为研究对象,应用基于封装结构版图的高保真有限元建模方法,旨在精确复杂互连结构的分布对封装内部湿气扩散路径的影响。基于菲克扩散方程与热传导方程在数学上的相似性,采用热传导分析模块类比模拟湿气在有机封装材料与金属材料之间的扩散行为。高保真有限元建模方法随着封装结构版图分辨率的增高面临与建模效率之间的平衡问题,经验证将分辨率控制于100×100至200×200区间时,建模时间可大幅降至425×425高分辨率模型的6.044%,同时仍保持与其相当的精度。数值模拟结果表明,湿气在封装结构中的扩散行为受到隔湿性材料的分布特征引导。该方法可发展应用于三维堆叠结构,研究结果可指导电子封装器件湿环境抗性的结构版图优化设计。

关键词: 高保真有限元建模方法, 湿扩散, 均匀化方法

Abstract: Facing the requirements of high environmental adaptability and high integration of in the field of integrated circuits, it is particularly important to study the moisture reliability and multi-scale problems of packing devices. The high-density metal traces and graphic design of electronic packaging structures are the main factors which affect the moisture diffusion. Taking the typical packaging structure of integrated circuits as the research object, the high-fidelity finite element modeling method based on the packaging structure layouts was applied to accurately simulate the influence of the distribution of moisture-insulating materials (such as metal tracing) on the diffusion path of moisture inside the packaging. In view of the mathematical similarity between the Fick’s diffusion equation and the heat conduction equation, the heat transform module in the finite element software was used to simulate the moisture diffusion between organic packaging materials and metal materials. The moisture stress is analyzed considering the arrangement of metal component arrangements based on the moisture-heat analogy method. The high-fidelity finite element modeling method faced the balance between modeling efficiency and resolution of packaging structural layouts. It was verified that by controlling the resolution in the range of 100×100 to 200×200, the modeling time was reduced to 6.044% of the 425×425 high-solution model, while still maintaining comparable accuracy. The numerical simulation results showed that the diffusion behavior of moisture in packaging structure was guide by the distribution characteristics of moisture-insulating materials. The method could be developed and applied to three-dimensional stacked structures, and the research results could guide the structural layout optimization design of electronic packaging devices for moisture environment resistance.

Key words: high-fidelity finite element modeling method, moisture diffusion, homogenization method