中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

导航

电子与封装

• •    下一篇

功率器件烧结银互连组织演化及性能影响研究进展

郭志濠,魏雨晨,钟志宏,梁水保   

  1. 合肥工业大学材料科学与工程学院,合肥  230009
  • 收稿日期:2026-01-28 修回日期:2026-03-13 出版日期:2026-03-23 发布日期:2026-03-23
  • 通讯作者: 梁水保
  • 基金资助:
    安徽省自然科学基金(2308085QE165,2208085ME134)

Research Advances on the Evolution and Performance Impact of Sintered Silver Interconnect Structures in Power Devices#br#

GUO Zhihao, WEI Yuchen, ZHONG Zhihong, LIANG Shuibao   

  1. School of Materials Science and Engineering, Hefei University of Technology, Hefei 230009, China
  • Received:2026-01-28 Revised:2026-03-13 Online:2026-03-23 Published:2026-03-23

摘要: 宽禁带半导体器件日益增长的功率密度及其高温稳定服役需求,对封装互连材料提出了更为严苛的要求。烧结银凭借其“低温烧结、高温服役”的独特优势及优异的电热性能,已成为功率器件实现高可靠固晶互连的理想材料。然而,烧结银固有的多孔微观组织在服役过程中的生长演化,显著影响其热-力学性能与长期可靠性。本文系统综述了服役条件下烧结银微观形貌的演化规律,重点阐述了孔洞粗化、晶粒生长与孔隙率演化的驱动机制,揭示了组织演化对热导率、力学性能及界面结合强度的影响规律,分析了其对互连失效行为的影响机理。通过总结国内外研究进展,以期为优化烧结银固晶互连的微观结构设计及提升功率器件的服役可靠性提供参考。

关键词: 功率器件封装, 固晶互连, 烧结银, 多孔结构, 形貌演化, 热-力性能

Abstract: The escalating power density of wide bandgap semiconductor devices, coupled with the stringent demand for stable operation in high-temperature environments, has imposed increasingly rigorous requirements on packaging interconnect materials. Sintered silver, characterized by its unique "low-temperature sintering and high-temperature service" capability and superior electrical/thermal performance, has emerged as an ideal die-attach material for high-reliability interconnects in power devices. However, the inherently porous microstructure of sintered silver undergoes significant morphological evolution during service, which profoundly impacts its thermo-mechanical properties and long-term reliability. This paper systematically reviews the evolution of sintered silver micro-morphology under service conditions, focusing on the driving mechanisms of pore coarsening, grain growth, and porosity changes. Furthermore, the influence of microstructural evolution on thermal conductivity, mechanical properties, and interfacial bonding strength is revealed, and the underlying interconnect failure mechanisms are analyzed. By synthesizing recent research progress, this work provides a theoretical reference for optimizing the microstructural design of sintered silver interconnects and enhancing the service reliability of power electronics.

Key words: power device packaging, die attach interconnect, sintered silver, porous structures, morphology evolution, thermo-mechanical properties