中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装

• 封装、组装与测试 •    下一篇

大功率器件烧结纳米银微观结构建模进展

赵显意1,龙旭1,2   

  1. 1. 西北工业大学力学与交通运载工程学院先进电子封装材料与结构研究中心,西安  710021;2. 浙江清华长三角研究院,浙江 嘉兴  314006
  • 收稿日期:2026-03-06 修回日期:2026-03-30 出版日期:2026-04-09 发布日期:2026-04-09
  • 通讯作者: 龙旭
  • 基金资助:
    国家自然科学基金(52475166);国家重点研发计划(2024YFE0204900)

Progress in Microstructure Modeling of Sintered Nanosilver for High-Power Devices

ZHAO Xianyi1, LONG Xu1,2   

  1. 1. Research Center for Advanced Electronic Packaging Materials and Structures, School of Mechanics and Civil Engineering, Northwestern Polytechnical University, Xi'an 710021, Shaanxi; 2. Yangtze Delta Region Institute of Tsinghua University, Jiaxing 314006, Zhejiang
  • Received:2026-03-06 Revised:2026-03-30 Online:2026-04-09 Published:2026-04-09
  • Contact: Xu Long

摘要: 烧结纳米银凭借其优异的导热与高温可靠性,已成为宽禁带半导体大功率器件封装的关键互连材料。其宏观性能本质上由烧结形成的微观结构,即孔隙与晶粒所决定。系统综述烧结纳米银微观结构建模的研究进展:针对孔隙相,详述基于三维层析成像的高保真重构、基于形状因子的参数化几何简化以及基于高斯随机场的统计建模方法;针对晶粒相,总结基于电子背散射衍射(EBSD)的实验数据驱动建模和基于Voronoi图的参数化建模策略。通过耦合孔隙与晶粒两相模型,构建多孔-多晶微观模型,是揭示其热-力-电性能与失效机理、实现“工艺-结构-性能”精准关联的核心途径。旨在为该材料的性能优化、可靠性设计与规模化应用提供理论依据与方法参考。

关键词: 封装材料, 烧结纳米银, 大功率器件, 微观结构, 建模方法

Abstract: Sintered nanosilver, owing to its excellent thermal conductivity and high-temperature reliability, has emerged as a key interconnect material for the packaging of wide-bandgap semiconductor high-power devices. Its macroscopic properties are fundamentally governed by the microstructure formed during sintering, namely pores and grains. This paper systematically reviews the recent advances in microstructure modeling of sintered nanosilver. For the pore phase, high-fidelity reconstruction based on three-dimensional tomography, parametric geometric simplification based on shape factors, and statistical modeling based on Gaussian random fields are discussed in detail. For the grain phase, experimental data-driven modeling based on electron backscatter diffraction (EBSD) and parametric modeling strategies based on Voronoi tessellations are summarized. By coupling the pore and grain phases to construct a porous polycrystalline microstructure model, this approach provides a fundamental pathway for elucidating the thermo-mechanical-electrical properties and failure mechanisms, as well as establishing precise correlations among processing, structure, and properties. This review aims to provide theoretical insights and methodological guidance for performance optimization, reliability design, and large-scale application of sintered nanosilver.

Key words: packaging materials, sintered nanosilver, high-power devices, microstructure, modeling methods