关键词: 图形分割, 参数, 曝光时间

Abstract: In the process of mask production,the data processing as a vital part,using the special data processing software to segment the graphic data of customer design into the data format of different exposure machines.In this paper,byadjusting the parameters of the data processing software to studythe influence of the laser beam exposure machine,electron beam exposure machine exposure data pattern cutting mode(fracture).The influence of the change of graphic cutting mode on the exposure time of two kinds of exposure machines is confirmed byexperimental data.Finally,through the reasonable optimization of the parameter value,in order to ensure the stability of the graphics,shorten the exposure time of the exposure machine,and ultimately achieve the purpose of improving production efficiency.

Key words: graph partition, parameter, exposure time