中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2022, Vol. 22 ›› Issue (8): 080202 . doi: 10.16257/j.cnki.1681-1070.2022.0801

• 封装、组装与测试 • 上一篇    下一篇

基于贝叶斯学习的PID温控算法在芯片烘箱中的应用*

梁达平1;赵利民1;王鸿斌2   

  1. 1.天水师范学院电信与电气工程学院,甘肃 天水 741000; 2.天水华天科技股份有限公司,甘肃 天水 741000
  • 收稿日期:2022-01-10 出版日期:2022-08-26 发布日期:2022-03-04
  • 作者简介:梁达平(1976—),男,四川达州人,硕士,讲师,研究方向为嵌入式控制系统设计。

Application of PID Temperature Control Algorithm Based on Bayesian Learning in Chip Oven

LIANG Daping1, ZHAO Limin1, WANG Hongbin2   

  1. 1. School of Electronic Information and Electrical Engineering, Tianshui Normal University, Tianshui 741000, China; 2. Tianshui Huatian Technology Co., Ltd., Tianshui 741000, China
  • Received:2022-01-10 Online:2022-08-26 Published:2022-03-04

摘要: 利用朴素贝叶斯分类器对芯片无氧化烘箱温度PID控制历史数据进行多代偏差和偏差变化量分析处理,来评价当前控制的有效性及参数设置的合理性;并与专家控制系统结合构成一种参数自整定机器学习方法,实现设备智能控制。基于该方法设计出自动收集数据集、进行贝叶斯学习训练及验证的程序算法。

关键词: PID控制, 贝叶斯学习算法, 机器学习, 芯片烘箱

Abstract: The naive Bayes classifier to analyze and process the multi-generation error and error variation of the PID temperature control without oxidation oven historical are used to evaluate the effectiveness of the current control and the rationality of the parameter settings. Combined with expert control system, a parameter self-tuning machine learning method is proposed to realize intelligent control of equipment. Based on this method, a program algorithm for automatic data collection and Bayesian learning training and verification is designed.

Key words: PID control, Bayesian learning algorithm, machine learning, chip oven

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