中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2025, Vol. 25 ›› Issue (2): 020401 . doi: 10.16257/j.cnki.1681-1070.2025.0017

• 材料、器件与工艺 • 上一篇    下一篇

GaN功率放大器输出功率下降失效分析*

张茗川,戈硕,袁雪泉,钱婷,章勇佳,季子路   

  1. 中国电子科技集团公司第五十五研究所,南京 ?210016
  • 收稿日期:2024-09-12 出版日期:2025-02-27 发布日期:2025-01-07
  • 作者简介:张茗川(1989—),男,江西吉安人,硕士,高级工程师,现从事GaN功率放大器可靠性及失效分析工作。

Failure Analysis of GaN Power Amplifier Output Power Decrease

ZHANG Mingchuan, GE Shuo, YUAN Xuequan, QIAN Ting, ZHANG Yongjia, JI Zilu   

  1. China Electronics Technology Group Corporation No. 55 Research Institute, Nanjing ?210016, China
  • Received:2024-09-12 Online:2025-02-27 Published:2025-01-07

摘要: GaN管芯是微波功率放大器的核心器件,其热性能很大程度上决定了功率放大器的电性能。针对某一型号功率放大器在直流老化后出现输出功率下降的现象,利用红外热像、声学扫描、能谱分析等分析方法对失效功率放大器开展了分析研究。结果表明,放大器管芯背金金属层之间发生明显分层,导致器件热阻增大,老炼时管芯结温超过安全工作区,从而使得放大器输出功率下降。

关键词: 功率下降, 背金, 热阻

Abstract: GaN dies are the core components in microwave power amplifiers, and their thermal performance largely determines the electrical performance of power amplifiers. Aiming at the phenomenon of output power decrease of a type of power amplifier after DC aging, infrared thermal imaging, acoustic scanning and energy spectrum analysis are used to analyze and study the failed power amplifier. The results show that there is a significant peeling between the metal layers on the back side metal of the die, leading to an increase in the thermal resistance. During aging, the junction temperature of the chip exceeds the safe operating zone, resulting in a decrease in amplifier output power.

Key words: power decrease, back side metal, thermal resistance

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