关键词: 熔丝修调, 迭代法, 熔丝步距

Abstract: With the rapid development of integrated circuits, the accuracy of fuse trimming is being paid increas-ingly more attention. Traditional look-up table trimming plan could no longer meet the accuracy re-quirements when the fuse step of some products are not consistent. The low yield in the test process leads to substantial loss of labor, materials and funds. Application of the iterative method in the calcu-lation of fuse trimming table has become an inevitable trend for better testing accuracy. The method could adjust the fuse trimming table in real time according to the current area of the wafer.

Key words: fuse trimming, iterative method, trimming step