关键词: 量测设备, 工件台, 花岗岩基座, 气浮导轨, 微晶玻璃

Abstract: During the measurement process of high precision measuring tool, temperature fluctuation and vibration of supporting floor will affect the measurement accuracy. First of all, this paper selects the appropriate measuring equipment and material to reduce the influence of temperature fluctuation. Secondly, the components equipped with damping function are selected to improve the stability of the measuring worktable. Thirdly, the air suspension mobile platform is used to reduce the friction and improve the measurement accuracy. Finally, the geometric accuracy analysis results of the structure and parts combination of the measuring equipment show that the horizontal / vertical linear movement of the high-precision measuring machine is less than 2 μm, and the suspension gap error of the air suspension platform is less than 1 μm.

Key words: measurementequipment, worktable, granitebase, airbearing, zerodur