[1] HARMAN G G. Wire bonding in microelectronics: materials, processes, reliability, and yield[M]. New York: McGraw-Hill, 1997. [2] CHAUHAN P S, CHOUBEY A, ZHONG Z W, et al. Copper wire bonding[M]. New York: Springer, 2014. [3] PRASAD S K. Advanced wire bond interconnection technology[M]. New York: Springer, 2004 [4] PALESKO C A, VARDAMAN E J. Cost comparison for flip chip, gold wire bond, and copper wire bond packaging[C]// 2010 Proceedings 60th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, USA: IEEE, 2010: 10-13. [5] SHAH A , ROCKEY T , XU H , et al. Advanced wire bonding technology for Ag wire[C]// 2015 IEEE 17th Electronics Packaging and Technology Conference (EPTC), Singapore: IEEE, 2015: 1-8. [6] 胡永达, 李元勋, 杨邦朝. 微电子封装技术[M]. 北京: 科学出版社, 2015. [7] 王元阳. 集成电路产业全书[M]. 北京: 电子工业出版社, 2018. [8] SAIKI H, MARUMO Y, NISHITAKE H, et al. Deformation analysis of Au wire bonding[J]. Journal of Materials Processing Technology, 2006, 177(1-3):709-712. [9] YAUW O, CALUBERG H, LEE K F, et al. Wire bonding optimization with fine copper wire for volume production[C]// 2010 12th Electronics Packaging Technology Conference, Singapore: IEEE, 2010: 468-472. [10] BAE I T, YOUNG J D, CHEN W T, et al. Intermetallic compound formation at Cu-Al wire bond interface[J]. Journal of Applied Physics, 2012, 112(12):123501. [11] NG B T, GANESH V P, LEE C. Optimization of gold wire bonding on electroless nickel immersion gold for high temperature applications[C]// 2006 8th Electronics Packaging Technology Conference, Singapore: IEEE, 2006: 277-282. [12] JEON I. The study on failure mechanisms of bond pad metal peeling: Part B––Numerical analysis[J]. Microelectronics Reliability, 2003, 43(12): 2055-2064. [13] 曹军, 范俊玲, 尚显光,等. 高温高湿环境对键合Cu线可靠性影响的研究[J]. 机械工程学报, 2016, 52(06): 86-91. [14] LEE J, MAYER M, ZHOU Y, et al. Pull Force and Tail Breaking Force Optimization of the Crescent Bonding Process with Insulated Au Wire[C]// 2007 9th Electronics Packaging Technology Conference, Singapore: IEEE, 2007: 725-730. [15] LEE J, MAER M, ZHOU Y, et al. Concurrent optimization of crescent bond pull force and tail breaking force in a thermosonic Cu wire bonding process[J]. IEEE Transactions on Electronics Packaging Manufacturing, 2009, 32(3): 157-163. [16] HO C E, CHEN C, KAO C R. Optimizing the wire‐bonding parameters for second bonds in ball grid array packages[J]. Journal of the Chinese Institute of Engineers, 2000, 23(5): 625-632. [17] REZVANI A. Experimental and numerical study of the mechanical aspects of the stitch bonding process in microelectronic wire bonding[D]. Waterloo: University of Waterloo, 2014. [18] QIN I, CHYLAK B, CLAUBERG H, et al. Ball bond process optimization with Cu and Pd-coated Cu wire[J]. ECS Transactions, 2012, 44(1): 891-901. [19] MOHAMED H A, WASHBURN J. Mechanism of solid state pressure welding[J]. Welding Research Supplement, 1975, 54(9): 302-310. [20] BAY N. Cold pressure welding—The mechanisms governing bonding[J]. Journal of Engineering for Industry, 1979, 101(2):121-127. [21] BAY N. Mechanisms producing metallic bonds in cold welding[J]. Welding Research Supplement, 1983,62: 137-142. [22] TAKAHASHI Y, SHIBAMOTO S, INOUE K. Numerical analysis of the interfacial contact process in wire thermocompression bonding[J]. IEEE Transactions on Components, Packaging, and Manufacturing Technology-Part A, 1996, 19(2): 213-223. [23] LUM I, MAYER M, ZHOU Y. Footprint study of ultrasonic wedge-bonding with aluminum wire on copper substrate[J]. Journal of Electronic Materials, 2006, 35(3): 433-442. [24] XU H, LIU C Q, SILBERSCHMIDT V V, et al. Initial bond formation in thermosonic gold ball bonding on aluminium metallization pads[J]. Journal of Materials Processing Technology, 2010, 210(8): 1035-1042. [25] LUM I, JUNG J P, ZHOU Y. Bonding mechanism in ultrasonic gold ball bonds on copper substrate[J]. Metallurgical and Materials Transactions A, 2005, 36A(5): 1279-1286. [26] 李军辉. 超声键合界面微结构生成机理与规律研究[D]. 长沙:中南大学, 2008. [27] 王福亮. 热超声倒装键合界面运动与界面性能的生成规律研究[D]. 长沙:中南大学, 2007. [28] MIAO W. Cu wire stitch bond reliability study under high temperature storage[C]// 2015 IEEE 17th Electronics Packaging and Technology Conference (EPTC), Singapore: IEEE, 2015: 1-4. [29] MASSALSKI T B, MURRAY J L, BENNETT L H, et al. Binary alloy phase diagrams[M]. Ohio: American Society for Metals, 1986. [30] LIU X J, WANG T C, CONG Y Q, et al. TEM study on the Cu wire stitch bonding interface[C]// 2011 12th International Conference on Electronic Packaging Technology and High Density Packaging, Shanghai, China: IEEE, 2011: 1-5. [31] LIU X J, WANG T C, CONG Y Q, et al. Study on interface of Pd-plated Cu wire stitch bonding[C]// 2011 International Symposium on Advanced Packaging Materials (APM), Xiamen, China: IEEE, 2011: 213-219. [32] TIAN Y H, LUM I, WON S J, et al. Experimental study of ultrasonic wedge bonding with copper wire[C]// 2005 6th International Conference on Electronic Packaging Technology, Shenzhen, China: IEEE, 2005: 389-393. [33] 罗珏, 康敏, 赵鹤然, 等. 金丝键合短尾问题分析及解决[J]. 微处理机, 2020,(3): 17-19. [34] 宗飞, 王志杰, 徐艳博, 等. 电子制造中的引线键合工艺(三)[J]. 电子与封装, 2013,13(3): 1-8. [35] SIONG C T, EU P L, TAN L C, et al. Insulated Au-flash PdCu wire processing and wire bond process robustness improvements for TBGA & LQFP packages[C]// 2015 IEEE 17th Electronics Packaging and Technology Conference (EPTC), Singapore: IEEE, 2015: 1-6. [36] LAM K W, HO H M, STOUKATCH S, et al. Fine pitch copper wire bonding on copper bond pad process optimization[C]// Proceedings of the 4th International Symposium on Electronic Materials and Packaging, Kaohsiung, Taiwan: IEEE 2002: 63-68. [37] FUJIMOTO K, NAKATA S, MANABE T, et al. Effects of bonding conditions and surface state on bondability: Study of Cu wire stitch bonding (1st Report)[J]. Welding International, 1996, 10(9): 705-710. [38] JI H J, LI M Y, WANG C Q. Interfacial characterization and bonding mechanism of ultrasonic wedge bonding[C]// 2006 7th International Conference on Electronic Packaging Technology, Shanghai, China: IEEE, 2006: 1-5. [39] FAH J L S, SEKARAN S, SUBARMANIYAN R R, et al. QFN challenges: Second bond improvement to eliminate the weak stitch (fish tail) failure mechanism on pre plated lead frame[C]// 2016 IEEE 37th International Electronics Manufacturing Technology (IEMT) & 18th Electronics Materials and Packaging (EMAP) Conference, Georgetown, Malaysia: IEEE, 2016: 1-6. [40] DESCARTIN A M., ZHANG X, SUN D, et al. Enhanced stitch bonding concept for QFN package's Cu wirebonding process[C]// 2014 IEEE 16th Electronics Packaging Technology Conference (EPTC), Singapore: IEEE, 2014: 645-649. [41] XU H, REZVANI A, BRUNNER J, et al. Development of advanced wire bonding technology for QFN devices[C]// 2015 IEEE 65th Electronic Components and Technology Conference (ECTC), San Diego, CA, USA: IEEE, 2015: 1385-1391. [42] SONG M J, YAO J Z, LU Y S. Failure mechanism and solution study of IC wire bond heel crack on leadframe[C]// 2008 10th Electronics Packaging Technology Conference, Singapore: IEEE, 2008: 1214-1219. [43] WEI T B, NIU K. Study of factors contributing to robust copper wire bond on QFN[C]// 2012 China Semiconductor Technology International Conference, Shanghai, China: SEMI and ECS, 2012:985-989. [44] TOK C W, LANGUT I, MENACHE A, et al. Wire bonding improvement through optimal bonding tools and materials selection[C]// 2007 9th Electronics Packaging Technology Conference, Singapore: IEEE, 2007: 743-749. [45] GOH K S, ZHONG Z W. A new bonding-tool solution to improve stitch bondability[J]. Microelectronic Engineering, 2007, 84(1): 173-179. [46] GOH K S, ZHONG Z W. Two capillary solutions for ultra-fine-pitch wire bonding and insulated wire bonding[J]. Microelectronic Engineering, 2007, 84(2): 362-367. [47] HARUN F, ISMAIL R, JALAR A. Effect of wire diameter and hook location on second bond failure modes[J]. Microelectronics International, 2015, 32(1):32-36. [48] KIM Y J, HAH J, MOON K S, et al. Novel decapsulation method for silver-based wire-bond semiconductor packages with high reliability using mixed salt-acid chemistry[J]. IEEE Transactions on Components, Packaging, and Manufacturing Technology, 2019, 9(8): 1459-1465. [49] DU Y, LIU Z Q, XIONG T, et al. Bond reliability under humid environment for Pd coated Cu and Ag alloy wire bonding[C]// 2015 16th International Conference on Electronic Packaging Technology (ICEPT), Changsha, China: IEEE, 2015: 835-839. [50] REN Z. Silver bonding wire for BSOB (Bond-Stitch-on-Ball)/BBOS (Bonding-Ball-on-Stitch) [C]// 2016 China Semiconductor Technology International Conference (CSTIC), Shanghai, China: IEEE, 2016: 1-3. [51] 梁爽, 黄福祥, 彭成, 等. 电子封装用铜及银键合丝研究进展[J]. 功能材料. 2019, 50(05): 5048-5053, 5063. [52] LALL P, DESHPANDE S, NGUYEN L. Reliability of copper, gold, silver, and PCC wirebonds subjected to harsh environment[C]// 2018 IEEE 68th Electronic Components and Technology Conference (ECTC), San Diego, CA, USA: IEEE, 2018: 724-734. [53] SINGH I, QIN I, XU H, et al. Pd-coated Cu wire bonding technology: Chip design, process optimization, production qualification and reliability test for high reliability semiconductor devices[C]// 2012 IEEE 62nd Electronic Components and Technology Conference, San Diego, CA, USA: IEEE, 2012: 1089-1096. [54] SARANGAPANI M, SENG E T S, YEUNG J W C. Characterization of coated silver wire bond interface using TEM[C]// 69th Electronic Components and Technology Conference (ECTC). 2019 IEEE 69th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, USA: IEEE, 2019: 2048-2053. [55] KUMAR B S, SIVAKUMAR M, LI M, et al. Process characterization of Cu & Pd coated Cu wire bonding on overhang die: Challenges and solution[C]// 2010 12th Electronics Packaging Technology Conference, Singapore: IEEE, 2010: 859-867. [56] 康菲菲, 杨国祥, 孔建稳, 等. 镀钯键合铜丝的发展趋势[J]. 材料导报, 2011, 25(21): 104-107, 128. [57] MURALI S, DEOK T Y, SENTHILKUMAR B, et al. Advancement in thermosonic bonding wire[J]. International Symposium on Microelectronics (2014), 2014(1): 278-282. [58] BAE I T, JUNG D Y, CHEN W T, et al. Comprehensive transmission electron microscopy study on Cu–Al intermetallic compound formation at wire bond interface[J]. Journal of Materials Research, 2014, 29(23):2787-2798. [59] LIN T.Y, DAVISON K.L, LEONG W.S, et al. Characteristics of silver-plated film on the second wire bondability[C]// 27th Annual IEEE/SEMI International Electronics Manufacturing Technology Symposium, San Jose, CA, USA: IEEE, 2002: 382-388. [60] LIN T Y, DAVISON K L, LEONG W S, et al. Surface topographical characterization of silver-plated film on the wedge bondability of leaded IC packages[J]. Microelectronics Reliability, 2003, 43(5):803-809. [61] MURALI S, SRIKANTH N, WONG Y M. Fundamentals of thermo-sonic copper wire bonding in microelectronics packaging[J]. Journal of Materials Science, 2007, 42(2):615-623. [62] ISMAIL R, HARUN F, JALAR A, et al. Mechanical interlocking on leadframe surface for bondability of Au wedge bond[J]. Materials Science Forum, 2016, 857: 79-82. [63] HUNG L Y, PAI Y C, CHIANG M Y, et al. Investigation of ultrasonic palladium coated copper wire wedge bonding on different surface finish[C]// 2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), Taipei, Taiwan: IEEE 2011: 122-125. [64] LI W H, ONG S W J. Cu diffusion in Ag-plated Cu leadframe packages[J]. Microelectronics Reliability, 2012, 52(7):1523-1527. [65] LIN T Y, LEONG W S, CHUA K H, et al. The impact of copper contamination on the quality of the second wire bonding process using X-ray photoelectron spectroscopy method[J]. Microelectronics Reliability, 2002, 42(3):375-380. [66] WANG ROBERT Q. PBGA cost reduction by reducing plated Au thickness of substrate pads[C]// China Semiconductor Technology International Conference 2010, Shanghai, China: SEMI and ECS, 2010:877-882. [67] HOLCOMB M D, BANKS D R, GORRELL R E, et al. Plated gold thickness effects on organic substrate wirebond pull strength and BGA ball shear[C]// SMAT international and assembly technology expo, Chicago, IL, USA: SMAT, 2001: 558-565. [68] GUO R, LI M, MAO D L, et al. Effects of the surface hardness of MIS leadframe on the bonding strength[C]// 2011 12th International Conference on Electronic Packaging Technology and High Density Packaging, Shanghai, China: IEEE, 2011: 958-962. [69] LI W H, ACUESTA A, MERCADO M G, et al. Cu wire bonding in Ni/Pd/Au-Ag and roughened Ni/Pd/Au-Ag pre-plated leadframe packages[C]// 2011 IEEE 13th Electronics Packaging Technology Conference, Singapore: IEEE, 2011: 794-797. [70] AN B, DING L, WANG T C, et al. Improvement of the second bond strength in copper wire bonding on pre-plated leadframe[C]// 2011 12th International Conference on Electronic Packaging Technology and High Density Packaging, Shanghai, China: IEEE, 2011: 1-4. [71] LEE C, CHECK-ENG R T, WAI-LIAN J O, et al. Plasma cleaning for plastic ball grid array (PBGA): a study on surface cleanliness, wire bondability and adhesion[C]// Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits, Singapore: IEEE, 1997: 50-55. [72] CHAN Y H, KIM J K, LIU D, et al. Improvements in Au wire bondability of rigid and flexible substrates using plasma cleaning[C]// 2005 6th International Conference on Electronic Packaging Technology, Shenzhen, China: IEEE, 2005: 366-371. [73] LIN Y S. A surface analysis on oxygen plasma-cleaned gold pattern-plated substrates for wire bondability[J]. Surface and Coatings Technology, 2003, 173(1):47-57.
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