关键词: X波段, 衰减器, 相位校正, 高线性度, 相控阵, TSV, BiCMOS

Abstract: A new 6 bit high linearity digital attenuator with low phase variations for X-band phased array systems is presented in the paper.After detailed analysis of the phase variation and linearity of conventional switched Pi attenuators,the paper uses the inductive and capacitive compensation technologies to enable the low phase variation at different attenuation states in a broadband frequency range.In addition,the floating substrate technique is applied to obtain high linearity.The attenuator is fabricated in 0.13 μm BiCMOS process.The simulation results of the proposed attenuator achieves 6.67 dB insert loss,the input power of minimumattenuation and maximumattenuation at 1 dB compression pointare 15.5 dBm and 21 dBm at 10 GHz.

Key words: X-Band, attenuator, phase correction, high linearity, phased array, TSV, BiCMOS