关键词: 金属-玻璃, 封装气密性, 内部水汽含量

Abstract: Devices with cavity structures are subjected to sealing tests (commonly known as leak detection) to determine the airtightness of the device package. However, in actual production, even if the devices that have passed the sealing test are tested for internal water vapor content, a certain proportion of the devices are still detected to have tracer substances inside for the sealing test. The test results show that the high temperature baking can improve the detection rate of leak detection, verifying that the phenomenon of qualified seal detection and unqualified water vapor content of the device is caused by temporary blockage of the leakage holes. Dye penetration and profile preparation of the sample with unqualified water vapor content are carried out, and the channel of external water vapor intrusion into the interior of the device is found. It is pointed out that the main reason of air leakage of device is that there is no airtight transition layer between the glass insulator and the lead wire, which provides the direction for the process improvement of the device.

Key words: metal-glass, air tightness of package, internal water vapor content