关键词: 氮化镓, 声表面波谐振器, 声子晶体, 品质因子, 传输损耗

Abstract: This paper presents a GaN-based surface acoustic wave (SAW) resonator structure based on coupled phononic crystals(PnC), aimed at improving the device's quality factor (Q). To validate the feasibility of this structure, COMSOL Multiphysics 6.2 simulation software was used to compare SAW resonators with one-dimensional phononic crystal reflectors and metal grating reflectors. The simulation results show that the transmission loss of the one-dimensional phononic crystal reflector is -24.29 dB, while the transmission loss of the metal grating reflector(MGRs) is only -15.5 dB. A SAW resonator with 100 pairs of interdigital transducers(IDT), 20 pairs of metal grating reflectors, and electrode width of 400 nm was designed, resulting in a quality factor of 2455. By optimizing the phononic crystal dimensions, the device's quality factor was significantly improved to 3 910, which is more than a 60% increase compared to traditional metal reflector grating structures, demonstrating outstanding performance.

Key words: gallium nitride, surface acoustic wave resonator, phononic crystal, quality factor, transmission loss