中国电子学会电子制造与封装技术分会会刊

中国半导体行业协会封测分会会刊

无锡市集成电路学会会刊

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电子与封装

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纳米铜烧结封装:抗氧化与可靠性

吴祥1,石云霞2   

  1. 1. 贵研催化剂(东营)有限公司,山东 东营  257091;2. 昆明理工大学,昆明  650093
  • 收稿日期:2026-05-11 修回日期:2026-06-18 出版日期:2026-06-26 发布日期:2026-06-26
  • 通讯作者: 吴祥
  • 基金资助:
    山东省泰山产业技能领军人才项目(tsjn20240815);2023年云南省兴滇英才支持计划产业创新人才项目(XDYC-CYCX-2023-0039)

Nano-Copper Sintering for Packaging: Oxidation Resistance and Reliability

WU Xiang1, SHI Yunxia2   

  1. 1. Sino-Platinum Metals Catalyst (Dongying) Co., Ltd., Dongying 257091, China; 2. Kunming University of Science and Technology, Kunming 650093, China
  • Received:2026-05-11 Revised:2026-06-18 Online:2026-06-26 Published:2026-06-26

摘要: 第三代宽禁带半导体器件对封装互连材料提出低温互连、高温服役双重严苛要求。传统锡基焊料难以适配高温工况,纳米银则受到高成本与电迁移问题限制。纳米铜兼具与银相近的导电和导热特性、低成本、抗电迁移能力优异,是理想替代材料,但其极易氧化,会显著降低烧结接头性能。综述功率半导体封装互连材料从银浆料到铜浆料的技术演进,梳理表面包覆、自还原、气氛辅助、双峰级配四类纳米铜抗氧化策略;分析铜与碳纳米管、石墨烯等碳材料的协同效应,揭示其在提升导热、导电性和缓解热膨胀失配方面的作用机制;总结烧结工艺参数对微结构与可靠性的影响,指出无压烧结、多材料界面匹配、绿色制造是纳米铜烧结技术中亟待突破的核心难题。

关键词: 第三代半导体, 功率电子封装, 低温烧结, 抗氧化, 碳基复合材料

Abstract: Third-generation wide-bandgap semiconductor devices impose dual stringent requirements on packaging interconnect materials: low-temperature interconnection and high-temperature serviceability. Traditional tin-based solders struggle to withstand high-temperature conditions, while nanosilver is limited by high costs and electromigration issues. Nano-copper, which combines electrical and thermal conductivity properties similar to those of silver with low cost and excellent resistance to electromigration, is an ideal alternative material. However, it is highly prone to oxidation, which can significantly degrade the performance of sintered joints. This paper reviews the technological evolution of interconnect materials for power semiconductor packaging, from silver paste to copper paste, and outlines four types of anti-oxidation strategies for nano-copper: surface coating, self-reduction, atmosphere-assisted, and bimodal particle size distribution; It analyzes the synergistic effects of copper with carbon materials such as carbon nanotubes and graphene, revealing their mechanisms of action in enhancing thermal and electrical conductivity and mitigating thermal expansion mismatch; it summarizes the impact of sintering process parameters on microstructure and reliability, and identifies pressureless sintering, multi-material interface matching, and green manufacturing as the core challenges requiring urgent breakthroughs in nano-copper sintering technology.

Key words: third-generation semiconductor, power electronic packaging, low-temperature sintering, anti-oxidation, carbon-based composite material