关键词: 掩模数字化生产, 全生命周期管理

Abstract: In the paper, an intelligent production system for Wuxi Zhongwei Mask Electronics Company and RFID-based intelligent management of mask manufacturing process are presented. The use of intelligent production systems enhances the interaction with customers. The private cloud manufacturing of mask is realized by the intelligent container system. Based on the existing intelligent production management system, the concept of integrated circuit whole industry chain intelligent manufacturing is proposed.

Key words: digital mask manufacturing, full-lifecycle management