关键词: 半导体测试, 中测, 探针, 接触电阻

Abstract: The paper introduces some influence of porbe contact resistance,the changes of probe needles surface in wafer test.Introduces some control ways to reduce contact resistance,such as control probe card production,regularly clean probe needles and blowing nitrogen in the testing process.Using kelvin connection and some other optimization method can avoid the influence of the contact resistance in electrical parameter test.The above method can effectively improve the accuracy and made testprocessswimmingly.

Key words: semiconductortesting, CP, probe, contactresistance