关键词: 功率器件, 导通压降, 探卡, 探针

Abstract: Power semiconductor devices are important components of various power electronic devices, which play a decisive role in the efficiency, reliability, power density and other performance of the system. As one of the most important parameters of the device, the on resistance directly affects the use of the device. The probe card is a kind of precise contact tooling used to test the chip before packaging. The distribution of the probe tip on the probe card and the position of the pin have a certain impact on the on-resistance test. It is found that the larger the chip area and test current, the greater the impact on the card detection test. Based on the above analysis, a probe card test on-resistance model is established. The accuracies of the model are found to be more than 96% under the same probe card and probe distribution, and more than 87% under different probe cards and probe distributions.

Key words: power device, conduction voltage drop, probe card, probe