关键词: 塑封器件, 声学扫描显微镜检查, 分层, 假象

Abstract: SAM is an important test item in the reliability analysis of PEM. However, the limitations of acoustic scanning equipment in the automatic identification of defects will lead to the generation of delamination-illusion. This paper points out the problems of the image coloring principle of the acoustic scanning equipment used and the characteristics of several common delamination-illusion, analyzes the physical principle of the waveform formation of different delamination-illusion,and based on this,puts forward an analysis method combining the? waveform detection with device structure. The practice shows that this method can correctly analyze the abnormal areas in the acoustic image and accurately identify the delamination-illusion.

Key words: PEM, SAM, delamination, illusion