中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2024, Vol. 24 ›› Issue (7): 070303 . doi: 10.16257/j.cnki.1681-1070.2024.0106

• 电路与系统 • 上一篇    下一篇

适用于Flash型FPGA的宽范围输出负压电荷泵设计

吴楚彬1,高宏1,马金龙1,张章2   

  1. 1.?中国电子科技集团公司第五十八研究所,江苏 无锡? 214035;2. 合肥工业大学微电子学院,合肥 ?230094
  • 收稿日期:2024-02-22 出版日期:2024-09-10 发布日期:2024-09-10
  • 作者简介:吴楚彬(1987—),男,广西梧州人,博士,工程师,主要研究方向为模拟集成电路设计、存储器电路设计。

Design of Wide Range Negative Output Voltage Charge Pump for Flash FPGA

WU Chubin1, GAO Hong1, MA Jinlong1, ZHANG Zhang2   

  1. 1. China Electronics TechnologyGroup Corporation No. 58 ResearchInstitute, Wuxi 214035, China; 2. School of Microelectronics,Hefei University of Technology, Hefei 230094, China
  • Received:2024-02-22 Online:2024-09-10 Published:2024-09-10

摘要: 在Flash型FPGA的编程、擦除和回读检验等操作中,需要对Flash单元提供不同的正负高压偏置。提出一种适用于Flash型FPGA的负压电荷泵,该电荷泵采用三阱Flash工艺,消除了衬偏效应和衬底漏电的影响。电荷泵主体采用双支路并联结构,级数为6级。通过参考电压产生电路提供不同的输入参考电压,并结合电荷泵控制系统,可以实现电荷泵输出电压的自由调节,满足Flash型FPGA编程、擦除的负压要求。基于0.13 μm Flash工艺对电荷泵进行设计及流片,在200 pF负载电容下,实测得到-5.5 V输出的建立时间仅为8 μs,输出纹波为72 mV,-17.5 V输出的建立时间为30 μs,输出纹波仅为56 mV,满足Flash型FPGA操作要求。

关键词: Flash型FPGA, 负压电荷泵, 三阱工艺

Abstract: It is necessary to provide different positive and negative high voltage biases for Flash cells during operations such as programming, erasing, and read-back checking of Flash FPGA. A negative voltage charge pump for Flash FPGA is proposed, which adopts triple-well Flash process to eliminate the influence of substrate bias and substrate leakage. The main body of the charge pump adopts a double-branch parallel structure with 6 stages. Different input reference voltages are provided by the reference voltage generation circuit, and combined with the charge pump control system, the output voltage of the charge pump can be freely adjusted to meet the negative voltage requirements for Flash FPGA programming and erasing. The charge pump is designed and taped out base on 0.13 μm Flash process. Under a 200 pF load capacitor, the measured setting time of the -5.5 V output is only 8 μs with an output ripple of 72 mV, while the -17.5 V output has a setting time of 30 μs and an output ripple of only 56 mV, meeting the operational requirements of Flash FPGA.

Key words: Flash FPGA, negative voltage charge pump, triple-well process

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