中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2025, Vol. 25 ›› Issue (8): 080103 . doi: 10.16257/j.cnki.1681-1070.2025.0100

• "新型传感器设计及封装技术"专题 • 上一篇    下一篇

基于SnO2/Co3O4的微波丙酮气体传感器*

周腾龙1吴滨1,2,秦晟栋2,吴蓓2,梁峻阁1   

  1. 1. 江南大学集成电路学院,江苏 无锡  214401;2. 无锡市恒通电器有限公司,江苏 无锡  214121
  • 收稿日期:2024-12-24 出版日期:2025-09-02 发布日期:2025-03-06
  • 作者简介:周腾龙(2000—),男,江苏盐城人,硕士研究生,研究方向为微波气体传感器。

Microwave Acetone Gas Sensor Based on SnO2/Co3O4

ZHOU Tenglong1, WU Bin1,2, QIN Shengdong2, WU Bei2, LIANG Junge1   

  1. 1. School of Integrated Circuits,Jiangnan University, Wuxi 214401, China; 2.WuxiHengtong Electronic Devices Co.,Ltd., Wuxi 214121, China
  • Received:2024-12-24 Online:2025-09-02 Published:2025-03-06

摘要: 为解决传统气体传感器需高温加热才能实现气体检测的问题,设计了一种基于螺旋结构的微波传感器,谐振器能在2.8 GHz谐振频率下产生独立传输零点,实现常温下对目标气体的检测。通过静电纺丝和高温煅烧工艺制备了SnO2/Co3O4复合纤维,并与谐振器组合形成了新型微波气体传感器。该传感器采用N-P复合异质结,实现了对20×10-6~120 ×10-6体积分数范围内丙酮的高精度测量,具有操作简便、低成本和小型化等优势。实验结果显示,在室温下,SnO2/Co3O4复合纤维对体积分数为120×10-6丙酮的响应表现为回波损耗变化,灵敏度为32.8×106 mdB。该研究为工业和实验室中低浓度、高精度气体检测提供了新方案。

关键词: 气体传感器, 复合异质结, 微波检测, 丙酮

Abstract: To address the issue that traditional gas sensors require high-temperature heating for gas detection, a microwave sensor based on a helical structure is designed. This resonator can generate an independent transmission zero at a resonant frequency of 2.8 GHz, enabling the detection of target gases at room temperature. SnO2/Co3O4 composite fibers are prepared via electrospinning and high-temperature calcination processes, and then integrated with the resonator to synthesize a novel microwave gas sensor. The sensor employs an N-P composite heterojunction, enabling high-precision detection of acetone within a volume concentration of 20 × 10-6 to 120 × 10-6. It offers advantages of simple operation, low cost, and miniaturization. Experimental results demonstrate that at room temperature, the SnO2/Co3O4 composite fibers exhibit a response to volume concentration of 120×10-6 acetone through variations in return loss, achieving a sensitivity of 32.8 × 106 mdB. This study provides a new solution for low-concentration, high-precision gas detection in industrial and laboratory applications.

Key words: gas sensor, composite heterojunction, microwave detection, acetone                                        

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