GaN基传感器研究进展*

doi:10.16257/j.cnki.1681-1070.2025.0143

摘要/Abstract

摘要： 在科技飞速发展的当下，传感技术作为信息获取的关键，不断向高灵敏度、微型化和多功能化的方向迈进。GaN材料具有高电子迁移率、宽能带隙、良好的化学稳定性等优点，在感知力学信号、识别化学离子、探测生物分子和检测气体等方面表现卓越，为实现高灵敏度、高选择性和快速响应的检测提供了新的解决方案。总结了GaN基传感器在力学、气体、化学、生物领域的最新研究进展，阐述其结构设计与制备工艺，分析了其在不同应用场景中的优势与面临的挑战。同时探讨了未来通过结合纳米技术、表面功能化及集成技术等，进一步提升传感器性能。

关键词: GaN, 传感器, 力学传感, 气体传感

Abstract: Currently, with the rapid development of science and technology, sensing technology, as the key to information acquisition, is constantly moving towards high sensitivity, miniaturization and multifunctionality. GaN materials have the advantages of high electron mobility, wide band gap, and good chemical stability, which are excellent in sensing mechanical signals, recognizing chemical ions, detecting biomolecules, and detecting gases, providing new solutions for realizing detection with high sensitivity, high selectivity and fast response. The latest research progress of GaN-based sensors in the fields of mechanics, gas, chemistry and biology is summarized, the structural design and preparation process are described, and the advantages and challenges of GaN-based sensors in different application scenarios are analyzed. Further improvements in sensor performance are explored through the combination of nanotechnology, surface functionalization, and integration technology.

Key words: GaN, sensor, mechanical sensing, gas sensing

中图分类号:

TP212.9

刘诗旻，陈佳康，王霄，郭明，王利强，王鹏超，宣艳，缪璟润，朱霞，白利华，尤杰，陈治伟，刘璋成，李杨，敖金平. GaN基传感器研究进展^*[J]. 电子与封装, 2025, 25(8): 080104 .

LIU Shimin, CHEN Jiakang, WANG Xiao, GUO Ming, WANG Liqiang, WANG Pengchao, XUAN Yan, MIAO Jingrun, ZHU Xia, BAI Lihua, YOU Jie, CHEN Zhiwei, LIU Zhangcheng, LI Yang, AO Jinping. Research Progress in GaN-Based Sensors[J]. Electronics & Packaging, 2025, 25(8): 080104 .

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中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

GaN基传感器研究进展^*

Research Progress in GaN-Based Sensors

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