中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2020, Vol. 20 ›› Issue (8): 080404 . doi: 10.16257/j.cnki.1681-1070.2020.0814

• 微电子制造与可靠性 • 上一篇    下一篇

LTCC滤波器侧面印刷工艺技术研究

杨靖鑫1,2,吴申立1,2,丁小聪1,2,董兆文1,2,麻茂生3   

  1. 1. 中国电子科技集团公司第四十三研究所,合肥 230022;2. 安徽省技术标准创新基地,合肥 230001;3. 中国科学技术大学,理化科学试验中心,合肥 230026
  • 接受日期:2020-05-06 出版日期:2020-08-25 发布日期:2020-08-25
  • 作者简介:杨靖鑫(1983—),男,湖北鄂州人,2011年毕业于中国科学院研究生院电子学研究所(北京)物理电子学专业,硕士学历,工程师,现主要从事电子陶瓷技术方面的研究工作。

Study on the Side Printing Technology of the LTCC Filter

YANG Jingxin1,2, WU Shenli1,2, DING Xiaocong1,2, DONG Zhaowen1,2, MA Maosheng3   

  1. 1. The 43rd Research Institute, CETC, Hefei 230022, China ; 2. Anhui Province Technical Standard Innovation Base, Hefei 230001, China; 3. Instruments’ Center for Physical Science, University of Science and Technology of China, HeFei 230026, China
  • Accepted:2020-05-06 Online:2020-08-25 Published:2020-08-25

摘要: 主要针对LTCC(Low Temperature Co-fired Ceramic)滤波器电气连通率较低的问题进行了相关研究。通过比较,发现自制的LTCC滤波器端口导带露出端偏薄,从而导致在端口印上导带之后与中间层导带在端口处的电气连接性能不佳。通过进一步的分析,发现导致滤波器端口导带过薄的原因有两个,一是生瓷切片时刀口的带瓷,二是烧结过程中导体浆料与瓷体材料的收缩率不一致导致导体内缩。最后针对性地提出了相应的改进措施,获得了最优化的工艺技术方案。

关键词: LTCC滤波器, 端头侧印, 收缩率, 网版套印

Abstract: This paper mainly studies the problem of low electrical connection rate of the LTCC filter. By comparison,The self-made LTCC filter has a thin side at the exposed end of the tape, which results in poor electrical connection with the intermediate layer conduction band at the port after the conductor is printed on the side. Through further research and analysis, it is found that there are two reasons why the side conduction band of the LTCC filter is too thin. The first factor is that the edge of the porcelain is sliced with porcelain knife, and the second factor is that the shrinkage of the conductor paste and the ceramic material during the sintering process is inconsistent, which causes the conductor to be indented inside. Finally, the corresponding improvement measures are proposed in a targeted manner, and the optimized process technology solution is obtained.

Key words: LTCC Filter, side printing, shrinkage factor, screen overlay printing technology

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